Stress and Other
Challenges with Evaporated Ni-Cr Thin Film Resistors Used in the Manufacture of
ASICs
Necmi Bilir and Long Do
Skyworks Solutions,
Inc.,
Keywords: thin film resistor, resistivity, Ni-Cr, TaN, stress
SUMMARY:
This paper studied the change in the characteristics
of the Ni-Cr thin film resistors developed at the Sunnyvale facility of
Skyworks Solutions,(formerly known as NDI-Alpha Industries), with the number of
depositions from the same source melt, as well as the effects of sputter etch
cleaning, oxygen plasma etch, HCl dip and regular annealing. were deposited in
the later runs, came up very seldom, if ever.